Date: 23rd Aug 2010

Rudolph acquires semiconductor chip yied enhancing software from MKS

Rudolph Technologies has acquired selected assets of the Yield Dynamics software business from MKS Instruments . The purchase includes selected assets and intellectual property (IP) related to MKS yield management software used by semiconductor manufacturers and fabless semiconductor suppliers. In addition to acquiring the software assets, approximately 35 engineering and applications personnel, most of whom are based in Tianjin, China, will join Rudolph’s Data Analysis and Review Business Unit. The Yield Dynamics package includes Genesis Enterprise software, a fabwide yield management solution that combines parametric and yield optimization in a unified platform with data mining and workflow development across all data sources.

“The products and technology include patented analytical techniques for yield improvement that are complementary to our existing yield management and process control portfolio,” stated Mike Plisinski, Rudolph’s vice president and general manager, Data Analysis and Review Business Unit. “In addition to the technology, we welcome the China personnel to our growing applications and product development team.”

Terms of the cash transaction are undisclosed. Rudolph does not expect the transaction to have any material impact on its operations for the remainder of the year or an impact on any previous financial guidance provided by the company.

Rudolph Technologies offers products for semiconductor fabs to enhance chip production yield. Rudolph's solutions used in semiconductor wafer processing and final manufacturing. MKS Instruments provides technologies for managing advanced processes in the wide areas of advanced manufacturing which includes production of semiconductor devices, flat panel displays, light emitting diodes (LEDs), and solar cells.